Hybrid nanopatterning using colloidal lithography and nanoimprint for the fabrication of nanotemplate

International Journal of Nanoscience

Volumn 7, Issue 1, 2008, Pages 73-79

  Choi, Dae Geun ^a   Jeong, Jun Ho ^a   Lee, Eung Sug ^a  

^a Korea Institute of Machine and Materials   (South Korea)

Author keywords

Colloidal lithography; Hybrid nanopatterning; Nanoimprint

Indexed keywords

DRY ETCHING; NANOIMPRINT LITHOGRAPHY; SELF ASSEMBLY;

BOTTOM-UP APPROACH; COLLOIDAL LITHOGRAPHY; FEATURE RESOLUTION; HYBRID NANOPATTERNING;

NANOSTRUCTURED MATERIALS;

ETCHING; LITHOGRAPHY;

EID: 43949138256     PISSN: 0219581X     EISSN: None     Source Type: Journal    
DOI: 10.1142/S0219581X08005109     Document Type: Article

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