An investigation of Love wave devices based on ZnO:Mg/LiNbO3 structure

Sensors and Actuators, B: Chemical

Volumn 132, Issue 1, 2008, Pages 312-318

  Chang, Ren Chuan ^a   Chu, Sheng Yuan ^a   Yeh, Po Wen ^a   Hong, Cheng Shong ^a,b   Huang, Hsin Hsuan ^a   Huang, Yi Jen ^a  

^a NATIONAL CHENG KUNG UNIVERSITY   (Taiwan)

^b CHIENKUO TECHNOLOGY UNIVERSITY   (Taiwan)

Author keywords

LiNbO3; Love wave; Sensitivity; Substrate temperature; ZnO

Indexed keywords

LITHIUM COMPOUNDS; MAGNESIUM; MAGNETRON SPUTTERING; SCANNING ELECTRON MICROSCOPY; SENSITIVITY ANALYSIS; THIN FILMS; ZINC OXIDE;

LOVE WAVE DEVICES; LOVE WAVES; SUBSTRATE TEMPERATURE;

CHEMICAL SENSORS;

EID: 43749085311     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2008.01.047     Document Type: Article

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