The influence of Mg doped ZnO thin films on the properties of Love wave sensors

Sensors and Actuators, B: Chemical

Volumn 132, Issue 1, 2008, Pages 290-295

  Chang, Ren Chuan ^a   Chu, Sheng Yuan ^a   Yeh, Po Wen ^a   Hong, Cheng Shong ^a,b   Kao, Po Ching ^a   Huang, Yi Jen ^a  

^a NATIONAL CHENG KUNG UNIVERSITY   (Taiwan)

^b CHIENKUO TECHNOLOGY UNIVERSITY   (Taiwan)

Author keywords

LiNbO3; Love wave; RF sputtering; Sensitivity; ZnO

Indexed keywords

CRYSTAL STRUCTURE; DOPING (ADDITIVES); MAGNESIUM; SCANNING ELECTRON MICROSCOPY; SENSITIVITY ANALYSIS; SENSORS; SPUTTERING; ZINC OXIDE;

LOVE WAVE SENSORS;

THIN FILMS;

EID: 43749111567     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2008.01.038     Document Type: Article

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