ZnO/quartz structure potentiality for surface acoustic wave pressure sensor

Sensors and Actuators, A: Physical

Volumn 128, Issue 1, 2006, Pages 78-83

  Talbi, A ^a   Sarry, F ^a,b   Elhakiki, M ^a   Le Brizoual, L ^a,c   Elmazria, O ^a,b,d,e,f   Nicolay, P ^a   Alnot, P ^a,b,d,g  

^a INSTITUT JEAN LAMOUR   (France)

^b Micro and Nanosystems Group   (France)

^c Laboratoire de la Physique des Milieux Ionises et Applications(LPMIA)   (France)

^d LPMIA Laboratory

^e IEEE

^f EEA(Club des Enseignants et des Chercheurs en Electronique Electrotechnique et Automatique)   (France)

^g UNIVERSITÉ DE LORRAINE   (France)

Author keywords

K 2; Pressure sensor; Quartz; SAW; TCF; Y cut; ZnO

Indexed keywords

PRESSURE SENSOR; SURFACE ACOUSTIC WAVE (SAW); TEMPERATURE COEFFICIENT OF FREQUENCY (TCF); Y-CUT;

ACOUSTIC WAVES; MICROELECTROMECHANICAL DEVICES; POTASSIUM; QUARTZ; SURFACE WAVES; ZINC OXIDE;

SENSORS;

EID: 33645149560     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2006.01.008     Document Type: Review

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