Nanoscale surface property estimation using proper orthogonal decomposition in atomic force microscopy

CIRP Annals - Manufacturing Technology

Volumn 57, Issue 1, 2008, Pages 563-566

  Lee, S I ^a   Hong, S H ^b   Lee, J M ^b  

^a University of Seoul   (South Korea)

^b Seoul National University   (South Korea)

Author keywords

Atomic force microscopy (AFM); Proper orthogonal decomposition (POD); Surface

Indexed keywords

ADHESION; ATOMIC FORCE MICROSCOPY; CANTILEVER BEAMS; CHARACTERIZATION; DECOMPOSITION;

NANOSCALE SURFACE PROPERTY; PROPER ORTHOGONAL DECOMPOSITION (POD); TAPPING MODES;

SURFACE PROPERTIES;

EID: 43649095455     PISSN: 00078506     EISSN: 17260604     Source Type: Journal    
DOI: 10.1016/j.cirp.2008.03.107     Document Type: Article

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