Calibration and industrial application of instrument for surface mapping based on AFM

CIRP Annals - Manufacturing Technology

Volumn 51, Issue 1, 2002, Pages 471-474

  Hansen, H N ^a   Kofod, N ^b   de Chiffre, L ^a   Wanheim, T ^a  

^a TECHNICAL UNIVERSITY OF DENMARK   (Denmark)

^b DANISH FUNDAMENTAL METROLOGY   (Denmark)

Author keywords

Atomic force microscopy (AFM); Coordinate measuring machine (CMM); Surface topography

Indexed keywords

ATOMIC FORCE MICROSCOPY; COORDINATE MEASURING MACHINES; JOINT PROSTHESES; PERFORMANCE; SURFACE ROUGHNESS;

SURFACE MAPPING;

CALIBRATION;

EID: 0013010043     PISSN: 00078506     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0007-8506(07)61563-7     Document Type: Article

References (12)

1. Lonardo P.M., Trumpold H., De Chiffre L., 1996, Progress in 3D surface microtopography characterization, Annals of the CIRP, 45/2: 589-598.
2. Vorburger T.V. et al, 1997, Industrial uses of STM and AFM, Annals of the CIRP, 46/2: 597-620.
3. De Chiffre, L. et al, 2000, Quantitative characterisation of surface texture. Annals of the CIRP, 49/2: 635-652.
4. De Chiffre, L. et al, 1999, Surface topography characterization using an atomic force microscope mounted on a coordinate measuring machine. Annals of the CIRP, 48/1: 463-466.
5. Kofod N., 1998, Three-dimensional characterization of surfaces with focus on atomic force microscopy, M.Sc.-thesis, Dept. of Manufacturing Engineering, Technical University of Denmark (in Danish).
6. Kofod, N., 2002 Validation of metrology AFM, Ph.D-thesis, Danish institute of Fundamental Metrology and Dept. of Manufacturing Engineering and Management, Technical University of Denmark.
7. VDI/VDE 2617, Accuracy of coordinate measuring machines, 1989, Characteristic parameters and their checking. Part 3, Components of measurement deviation of the machine, Verein Deutscher Ingenieure, Düsseldorf, Germany.
8. Hansen H.N., 1997, Verification and calibration of CMMs, Ph.D.-thesis, Technical University of Denmark.
9. rd seminar on quantitative microscopy (QM’98), Lyngby, Denmark.
10. Kofod, N, Hansen, H.N., Chiffre, L. De, 1999, Characterization of fine surfaces using an atomic force microscope mounted on a coordinate measuring machine”, Vol. 2, pp. 278-281, Shaker-Verlag, Paper for the 1st EuSPEN conference May-June 1999.
11. Kofod, N, et al. 1999, Surface characterization of oral implants, Clinical Oral Implants Research, Vol. 10, Issue no. 2, pp. 172 (P#7) Munksgaard (EAO), Copenhagen, Denmark.
12. Garnaes J., et al, 2002, Traceable step height and roughness measurements with atomic force microscopes, Paper accepted for publication in Precision Engineering 2002.