Proper orthogonal decomposition and component mode synthesis in macromodel generation for the dynamic simulation of a complex MEMS device

Journal of Micromechanics and Microengineering

Volumn 13, Issue 5, 2003, Pages 646-654

  Lin, W Z ^a   Lee, K H ^b   Lim, S P ^b   Liang, Y C ^a,c  

^a INSTITUTE OF HIGH PERFORMANCE COMPUTING   (Singapore)

^b NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

^c JILIN UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; ELECTROSTATIC ACTUATORS; FINITE DIFFERENCE METHOD; FINITE ELEMENT METHOD; MATHEMATICAL MODELS; MICROELECTRONIC PROCESSING; NONLINEAR EQUATIONS; OPTIMIZATION; PARTIAL DIFFERENTIAL EQUATIONS;

ELECTROSTATIC ACTUATION FORCE; GAS FILM DAMPING; KARHUNEN-LOEVE DECOMPOSITION; PROPER ORTHOGONAL DECOMPOSITION;

MICROELECTROMECHANICAL DEVICES;

EID: 0141830165     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/13/5/316     Document Type: Article

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