Small devices in SOI: Fabrication and design issues

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5357, Issue , 2004, Pages 75-86

  Reed, G T ^a   Masanovic, G Z ^a   Headley, W R ^a   Png, C E ^a   Chan, S P ^a   Lim, S T ^a   Passaro, V M N ^b   Hak, D ^c   Cohen, O ^c   Paniccia, M ^d  

^a UNIVERSITY OF SURREY   (United Kingdom)

^b POLITECNICO DI BARI   (Italy)

^c INTEL CORPORATION   (Israel)

^d INTEL CORPORATION   (United States)

Author keywords

Grating coupler; Integrated optics; Optical coupling; Optical waveguides; Phase modulator; Photonic circuits; Ring resonator; Silicon on insulator; Thermo optic effect

Indexed keywords

GRATING COUPLER; OPTICAL COUPLING; PHASE MODULATOR; PHOTONIC CIRCUITS; RING RESONATOR; SILICON ON INSULATOR; THERMO-OPTIC EFFECT;

COMPUTER SIMULATION; COST EFFECTIVENESS; DIFFRACTION GRATINGS; INTEGRATED OPTICS; LIGHT MODULATION; LIGHT POLARIZATION; OPTICAL COMMUNICATION; OPTICAL RESONATORS; OPTICAL WAVEGUIDES; PHASE MODULATION; PHASE SHIFT; SILICON WAFERS;

SILICON ON INSULATOR TECHNOLOGY;

EID: 4344703160     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.527422     Document Type: Conference Paper

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