Fabrication of optical ring resonators in silicon on insulator

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5357, Issue , 2004, Pages 67-74

  Headley, William R ^a   Reed, Graham T ^a   Liu, Ansheng ^b   Cohen, Oded ^c   Hak, Dani ^c   Paniccia, Mario ^b   Howe, Simon ^a   Huille, Inga ^a  

^a UNIVERSITY OF SURREY   (United Kingdom)

^b INTEL CORPORATION   (United States)

^c INTEL CORPORATION   (Israel)

Author keywords

Rib waveguides; Ring resonators; Silicon On Insulator (SOI); Silicon photonics

Indexed keywords

OPTICAL RING RESONATORS; RIB WAVEGUIDES; SILICON ON INSULATOR (SOI); SILICON PHOTONICS;

APPROXIMATION THEORY; DENSE WAVELENGTH DIVISION MULTIPLEXING; INTEGRATED OPTICS; LIGHT POLARIZATION; MATHEMATICAL MODELS; MATRIX ALGEBRA; OPTICAL COMMUNICATION; OPTICAL RESONATORS; OPTICAL WAVEGUIDES; PHASE SHIFT; ULSI CIRCUITS;

SILICON ON INSULATOR TECHNOLOGY;

EID: 4344715170     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.527420     Document Type: Conference Paper

References (14)

1. 2 microring resonator optical channel dropping filters. IEEE Phot. Tech. Lett., 1998.10(4): p. 549-551.
2. P. Dainesi, A. Kung, M. Chabloz, A. Lagos, Ph. Fluckiger, A. Ionescu, P. Fazan, M. Declerq, Ph. Renaud, and Ph. Robert, CMOS compatible fully integrated mach-zehnder interferometer in SOI technology. IEEE Phot. Tech. Lett., 2000.12(6): p. 660-662.
3. C.K. Tang, G.T. Reed, A.J. Wilson, and A.G. Rickman, Low-loss, single-mode, optical phase modulator in SIMOX material. J. of Light. Tech., 1994.12(8): p. 1394-1400.
4. T. W. Ang, A. Vonsovici, G. T. Reed, A. G. R. Evans, P. R. Routley, and M. R. Josey, "Blazed grating couplers in Unibond SOI", Proc. SPIE, 3896, pp. 360-368, 1999.
5. P.D. Hewitt and G.T. Reed, "Improving the response of optical phase modulators in SOI by computer simulation," J. Lightwave Technol., vol. 18, pp. 443-450, Mar. 2000.
6. D.R. Lim, B.E. Little, K. K. Lee, M. Morse, H. H. Fujimoto, H.A. Haus, and L. Kimerling. Micron-sized channel dropping filters using silicon waveguide devies. 1999. Boston, MA: SPIE.
7. S.T. Chu, B.E. Little, W. Pan, and Y. Kokubun. A cross-grid array of microresonators for very large scale integrated photonic circuits, in Lasers and Electro-Optics. 1999. Baltamore, MD.
8. R. Grover, V. Van, T.A. Ibrahim, P.P. Absil, L.C. Calhoun, F.G. Johnson, J.V. Hryniewicz, and P.-T. Ho, Parallel-cascaded semiconductor microring resonators for high-order and wide-FSR filters. J. of Light. Tech., 2002. 20(5): p. 900-905.
9. P.P. Absil, J.V. Hyrniewicz, B.E. Little, R.A. Wilson, L.G. Joneckis, and P.-T. Ho, Compact microring notch filters. IEEE Phot. Tech. Lett., 2000.12(4): p. 398-400.
10. B.E. Little, H.A. Haus, J.S. Foresi, L.C. Kimerling, E.P. Ippen, and D.J. Ripin, Wavelength switching and routing using absorption and resonance. IEEE Photon. Tech. Lett., 1998.10: p. 816-818.
11. T.A. Ibrahim, W. Cao, Y. Kim, J. Li, J. Goldhar, P.-T. Ho, and C.H. Lee, All-optical switching in a laterally coupled microring resonator by carrier injection. IEEE Phot. Tech. Lett., 2003 15(1): p. 36-38.
12. A. Yariv, Critical coupling and its control in optical waveguide-ring resonator systems. IEEE Phot. Tech. Lett., 2002.14(4): p. 483-485.
13. Rsoft Design Group, Inc.: 200 Executive Group Blvd. Ossining, NY 10562, www.rsoftinc.com.
14. Ibis Technology Corp., 32A Cherry Hill Drive, Danvers, MA 01923, USA.