Optimization procedures for metal-coated NSOM aperture array

Applied Physics A: Materials Science and Processing

Volumn 79, Issue 4-6, 2004, Pages 1189-1193

  Choi, S S ^a   Song, M S ^a   Kim, D W ^a   Park, M J ^a,b  

^a SunMoon University   (South Korea)

^b Korea Military Academy   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ADHESION; ANNEALING; ARRAYS; DATA STORAGE EQUIPMENT; DEPOSITION; ELECTRON BEAMS; ETCHING; METALLIC FILMS; MORPHOLOGY; OPTICAL SENSORS; OPTIMIZATION; PHOTOLITHOGRAPHY; SCANNING ELECTRON MICROSCOPY; SILICON WAFERS;

APERTURES; METAL DEPOSITION; THERMAL ANNEALING; THERMAL OXIDATION;

NEAR FIELD SCANNING OPTICAL MICROSCOPY;

EID: 4344683378     PISSN: 09478396     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00339-004-2701-3     Document Type: Conference Paper

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