Programmable thermal processing module for semiconductor substrates

IEEE Transactions on Control Systems Technology

Volumn 12, Issue 4, 2004, Pages 493-509

  El Awady, Khalid ^a   Schaper, Charles D ^b   Kailath, Thomas ^b  

^a Strategic Decisions Group   (United States)

^b Stanford University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

LINEAR QUADRATIC REGULATOR; PHOTOMASKS; PROGRAMMABLE THERMAL PROCESSING MODULE; SEMICONDUCTOR SUBSTRATES; SEMICONDUCTOR WAFER; THERMAL MASS;

COMPUTER SIMULATION; CONTROL SYSTEM ANALYSIS; CONTROL SYSTEM SYNTHESIS; FEEDBACK CONTROL; IDENTIFICATION (CONTROL SYSTEMS); LINEAR CONTROL SYSTEMS; LITHOGRAPHY; MASKS; MATHEMATICAL MODELS; SUBSTRATES; TEMPERATURE CONTROL; THERMAL CYCLING;

MULTIVARIABLE CONTROL SYSTEMS;

EID: 4344682782     PISSN: 10636536     EISSN: None     Source Type: Journal    
DOI: 10.1109/TCST.2004.824775     Document Type: Article

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