Fabrication of micromechanical tunneling probes and actuators on a silicon chip

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 38, Issue 12 B, 1999, Pages 7185-7189

  Toshiyoshi, Hiroshi ^a   Goto, Masahide ^a   Mita, Makoto ^a   Fujita, Hiroyuki ^a   Kobayashi, Dai ^b   Hashiguchi, Gen ^c   Endo, Junji ^d   Wada, Yasuo ^d  

^a INSTITUTE OF INDUSTRIAL SCIENCE   (Japan)

^b TOKYO DENKI UNIVERSITY   (Japan)

^c KAGAWA UNIVERSITY   (Japan)

^d HITACHI LTD   (Japan)

Author keywords

In situ observation; Micro actuator; Micromachine; Micromachining; Nanocantilever; Scanning tunneling microscopy

Indexed keywords

ETCHING; MICROACTUATORS; MICROMACHINING; MICROPROCESSOR CHIPS; SCANNING TUNNELING MICROSCOPY; SEMICONDUCTING SILICON; SUBSTRATES; TRANSMISSION ELECTRON MICROSCOPY; VOLTAGE CONTROL;

MICROMECHANICAL TUNNELING PROBES; NANOCANTILEVERS;

NANOTECHNOLOGY;

EID: 0033332168     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.38.7185     Document Type: Article

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