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Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 22, Issue 4, 2004, Pages 1591-1595

Textured growth of cubic gallium nitride thin films on Si (100) substrates by sputter deposition

(2) Kim, Joo Han a Holloway, Paul H b,c

a INTEL CORPORATION (United States)

b University of Florida (United States)

c UNIVERSITY OF FLORIDA (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPOSITIONAL PROPERTIES; STONEY'S FORMULA; X-RAY ROCKING CURVE ANALYSIS;

AUGER ELECTRON SPECTROSCOPY; CRYSTAL ORIENTATION; ELECTRON BEAMS; FILM GROWTH; GALLIUM NITRIDE; LIGHT EMITTING DIODES; MAGNETRON SPUTTERING; RESIDUAL STRESSES; SILICON; SPUTTER DEPOSITION; ULTRAVIOLET RADIATION;

THIN FILMS;

EID: 4344590803 PISSN: 07342101 EISSN: None Source Type: Journal
DOI: 10.1116/1.1705643 Document Type: Conference Paper

Times cited : (5)

References (14)

1
- 0005985130
- S. J. Pearton, J. C. Zolper, R. J. Shul, and F. Ren, J. Appl. Phys. 86, 1 (1999).
- (1999) J. Appl. Phys. , vol.86 , pp. 1
- Pearton, S.J.¹ Zolper, J.C.² Shul, R.J.³ Ren, F.⁴

2
- 0000815007
- [See references therein.]
- S. Strite and H. Morkoç, J. Vae. Sci. Technol. B 10, 1237 (1992). [See references therein.]
- (1992) J. Vae. Sci. Technol. B , vol.10 , pp. 1237
- Strite, S.¹ Morkoç, H.²

3
- 1242309309
- J. H. Kim and P. H. Holloway, Appl. Phys. Lett. 84, 711 (2004).
- (2004) Appl. Phys. Lett. , vol.84 , pp. 711
- Kim, J.H.¹ Holloway, P.H.²

4
- 1942508980
- J. H. Kim and P. H. Holloway, Appl. Phys. Lett. 84, 2070 (2004).
- (2004) Appl. Phys. Lett. , vol.84 , pp. 2070
- Kim, J.H.¹ Holloway, P.H.²

5
- 0036565058
- J. H. Kim and P. H. Holloway, J. Vac. Sci. Technol. A 20, 928 (2002).
- (2002) J. Vac. Sci. Technol. A , vol.20 , pp. 928
- Kim, J.H.¹ Holloway, P.H.²

6
- 0346910479
- J. H. Kim, M. R. Davidson, and P. H. Holloway, Appl. Phys. Lett. 83, 4746 (2003).
- (2003) Appl. Phys. Lett. , vol.83 , pp. 4746
- Kim, J.H.¹ Davidson, M.R.² Holloway, P.H.³

7
- 0347752395
- J. H. Kim, N. Shepherd, M. R. Davidson, and P. H. Holloway, Appl. Phys. Lett. 83, 4279 (2003).
- (2003) Appl. Phys. Lett. , vol.83 , pp. 4279
- Kim, J.H.¹ Shepherd, N.² Davidson, M.R.³ Holloway, P.H.⁴

8
- 0008362603
- T. Lei, M. Fanciulli, R. J. Molnar, T. D. Moustakas, R. J. Graham, and J. Scanlon Appl. Phys. Lett. 59, 944 (1991).
- (1991) Appl. Phys. Lett. , vol.59 , pp. 944
- Lei, T.¹ Fanciulli, M.² Molnar, R.J.³ Moustakas, T.D.⁴ Graham, R.J.⁵ Scanlon, J.⁶

9
- 0001388985
- J. H. Kim and K. W. Chung, J. Appl. Phys. 83, 5831 (1998).
- (1998) J. Appl. Phys. , vol.83 , pp. 5831
- Kim, J.H.¹ Chung, K.W.²

10
- 0031189259
- J. H. Kim, D. H. Ahn, Y. H. Kim, and H. K. Baik, J. Appl. Phys. 82, 658 (1997).
- (1997) J. Appl. Phys. , vol.82 , pp. 658
- Kim, J.H.¹ Ahn, D.H.² Kim, Y.H.³ Baik, H.K.⁴

11
- 0032614643
- Y. Zhao, C. W. Tu, I.-T. Bae, and T.-Y. Seong, Appl. Phys. Lett. 74, 3182 (1999).
- (1999) Appl. Phys. Lett. , vol.74 , pp. 3182
- Zhao, Y.¹ Tu, C.W.² Bae, I.-T.³ Seong, T.-Y.⁴

12
- 0029340897
- D. Chandrasekhar, D. J. Smith, S. Strite, M. E. Lin, and H. Morkoç, J. Cryst. Growth 152, 135 (1995).
- (1995) J. Cryst. Growth , vol.152 , pp. 135
- Chandrasekhar, D.¹ Smith, D.J.² Strite, S.³ Lin, M.E.⁴ Morkoç, H.⁵

13
- 0033321238
- M. P. Thompson, G. W. Auner, and A. R. Drews, J. Electron. Mater. 28, L17 (1999).
- (1999) J. Electron. Mater. , vol.28
- Thompson, M.P.¹ Auner, G.W.² Drews, A.R.³

14
- 0003708258
- Perkin-Elmer, Eden Prairie, MN
- G. E. Muileberg, Handbook of Auger Electron Spectroscopy (Perkin-Elmer, Eden Prairie, MN, 1978).
- (1978) Handbook of Auger Electron Spectroscopy
- Muileberg, G.E.¹

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