Crystallization and ferroelectric behavior of sputter deposited PZT using a target containing excess Pb and O contents

Thin Solid Films

Volumn 355, Issue , 1999, Pages 525-530

  Ha, Soon Mok ^a   Kim, Do Hyun ^a   Park, Hyung Ho ^a   Kim, Tae Song ^b  

^a Yonsei University   (South Korea)

^b Korea Institute of Science and Technology   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

COERCIVE FORCE; CRYSTALLIZATION; ELECTRIC SPACE CHARGE; FATIGUE OF MATERIALS; FERROELECTRIC MATERIALS; LEAD; OXYGEN; PEROVSKITE; RAPID THERMAL ANNEALING; SPUTTER DEPOSITION; SUBSTRATES;

AMELIORATION; SPACE CHARGE LAYER MODEL;

THIN FILMS;

EID: 0033364926     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(99)00372-2     Document Type: Article

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