Piezoelectric microcantilever array for multiprobe scanning force microscopy

IEICE Transactions on Electronics

Volumn E80-C, Issue 2, 1997, Pages 269-273

  Itoh, Toshihiro ^a   Azumi, Ryutaro ^a   Suga, Tadatomo ^a  

^a UNIVERSITY OF TOKYO   (Japan)

Author keywords

Multiprobe SFM; Parallel operation; Piezoelectric actuation; Piezoelectric cantilever array

Indexed keywords

ACTUATORS; LITHOGRAPHY; MICROSCOPIC EXAMINATION; PROBES; SEMICONDUCTING FILMS; SENSITIVITY ANALYSIS; SENSORS; SILICA; VIBRATION MEASUREMENT;

MULTIPROBE SCANNING FORCE MICROSCOPY (SFM); PIEZOELECTRIC CANTILEVER ARRAY;

PIEZOELECTRIC DEVICES;

EID: 0031071805     PISSN: 09168524     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (10)

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