Discrete impurity dopant fluctuation in multi-fin FinFFTs: 3D simulation-based study

IEEE Conference on Electron Devices and Solid-State Circuits 2007, EDSSC 2007

Volumn , Issue , 2007, Pages 577-580

  Lin, Jeng Nan ^a   Chan, Kuo Chih ^a   Chen, Chin Yu ^a   Chiang, Meng Hsueh ^a  

^a NATIONAL ILAN UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

DEVICE SCALING; DEVICE STRUCTURES; FINFET TECHNOLOGIES;

COMPUTER SIMULATION; FINITE DIFFERENCE METHOD; GATE DIELECTRICS; RANDOM PROCESSES; SCALING LAWS;

FIELD EFFECT TRANSISTORS;

EID: 43049164004     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/EDSSC.2007.4450190     Document Type: Conference Paper

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