Continuous wavelet transform for micro-component profile measurement using vertical scanning interferometry

Optics and Laser Technology

Volumn 40, Issue 7, 2008, Pages 920-929

  Li, M ^a   Quan, C ^a   Tay, C J ^a  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

Author keywords

Continuous wavelet transform (CWT); Profile measurement; Vertical scanning interferometry (VSI)

Indexed keywords

ALGORITHMS; COMPUTATIONAL EFFICIENCY; INTERFEROMETRY; LIGHT SOURCES; PROFILOMETRY;

CONTINUOUS WAVELET TRANSFORM (CWT); PROFILE MEASUREMENT; VERTICAL SCANNING INTERFEROMETRY (VSI);

WAVELET TRANSFORMS;

EID: 43049124368     PISSN: 00303992     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.optlastec.2008.01.013     Document Type: Article

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