White-light interferometric measurement of spherical and aspherical surfaces

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6280 I, Issue , 2006, Pages

  Chang, Suping ^a   Xie, Tiebang ^a  

^a HUAZHONG UNIVERSITY OF SCIENCE AND TECHNOLOGY   (China)

Author keywords

Error analysis; Shape measurement; Vertical scanning white light interferometric measurement

Indexed keywords

DIFFRACTION GRATINGS; ERROR ANALYSIS; IMAGE PROCESSING; INTERFEROMETRY; OPTICAL SENSORS;

SHAPE MEASUREMENT; WHITE-LIGHT INTERFEROMETRIC SYSTEMS;

SURFACE STRUCTURE;

EID: 33846159085     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.716114     Document Type: Conference Paper

References (4)

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