Robust design of a decoupled vibratory microgyroscope considering over-etching as a fabrication tolerance factor

JSME International Journal, Series A: Solid Mechanics and Material Engineering

Volumn 49, Issue 2, 2006, Pages 273-281

  Ha, Sung Kyu ^a   Jeong, Hee Moon ^b   Kim, Jun O ^b  

^a Hanyang University   (South Korea)

^b Samsung Advanced Institute of Technology (SAIT)   (South Korea)

Author keywords

Decoupled vibratory microgyroscope; MEMS fabrication tolerance; Optimization; Over etching; Robust design

Indexed keywords

COMPUTER SIMULATION; ETCHING; FABRICATION; FREQUENCY RESPONSE; MONTE CARLO METHODS; OPTIMIZATION; PRODUCT DESIGN;

DECOUPLED VIBRATORY MICROGYROSCOPE; MEMS FABRICATION TOLERANCE; OVER-ETCHING; ROBUST DESIGN;

GYROSCOPES;

COMPUTER SIMULATION; ETCHING; FABRICATION; FREQUENCY RESPONSE; GYROSCOPES; MONTE CARLO METHODS; OPTIMIZATION; PRODUCT DESIGN;

EID: 33750352475     PISSN: 13447912     EISSN: 13475363     Source Type: Journal    
DOI: 10.1299/jsmea.49.273     Document Type: Article

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