Simulation and test of a doubly decoupled lateral axis gyroscope

Proceedings of the International Conference on Integration and Commercialization of Micro and Nanosystems 2007

Volumn A, Issue , 2007, Pages 501-504

  Liu, Xuesong ^a   Lv, Bo ^a   Yang, Zhenchuan ^a   Ding, Haitao ^a   Yan, Guizhen ^a  

^a PEKING UNIVERSITY   (China)

Author keywords

Doubly decoupled; Micromachined lateral gyroscope; Simulation

Indexed keywords

DOUBLY DECOUPLED; MECHANICAL COUPLING; MICRO LASER DOPPLER VIBRATION METER; MICROMACHINED LATERAL GYROSCOPES;

COMPUTER SIMULATION; MICROMACHINING; NATURAL FREQUENCIES; VIBRATIONS (MECHANICAL);

GYROSCOPES;

EID: 34547927920     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1115/MNC2007-21309     Document Type: Conference Paper

References (8)

1. S. E. Alper and T. Akin, Journal of MEMS, 14(4), p.707 (2005)
2. U. M. Gomez, B. Kuhlmann, J. Classen, et. al., Proc. Transducers, p. 184, (2005)
3. W. Geiger, J. Merz, T. Fischer, et. al., Sensors and Actuators 84, p.280 (2000)
4. Y. Mochida, M. Tamura, K. Ohwada, Proc. IEEE MEMS, p.618 (1999)
5. Z. C. Yang, C. S. Wang, G. Z. Yan, et. al., Proc. Transducers, p.121, (2005)
6. X. S. Liu, Z. C. Yang, G. Z. Yan, et. al., Proc. IEEE NEMS, p.764 (2006)
7. W. Geiger, W.U. Butt, A. Gaisser, et. al., Proc. IEEE MEMS, p.21 (2001)
8. J. Kim, S. Park, D. Kwak, et. al., Proc. IEEE MEMS, p.556 (2004)