Design and fabrication of a lateral axis gyroscope with asymmetric comb-fingers as sensing capacitors

Proceedings of 1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS

Volumn , Issue , 2006, Pages 762-765

  Liu, Xuesong ^b   Yang, Zhengchuan ^b   Yan, Guizhen ^a   Fan, Jie ^b   Ding, Haitao ^b   Liu, Ye ^b  

^a PEKING UNIVERSITY   (China)

^b NONE

Author keywords

Bulk micromachined; Doubly decoupled; Gyroscope; Out of plane movement; Vertical comb

Indexed keywords

(E ,3E) PROCESS; AIR DAMPING; BULK MICROMACHINED; COMB STRUCTURES; DEEP REACTIVE ION ETCHING (DRIV); DIFFERENTIAL METHODS; DOUBLY DECOUPLED; ETCHING MASKS; FABRICATION PROCESSES; INTERNATIONAL CONFERENCES; MOLECULAR SYSTEMS; OUT OF PLANE; SENSING CAPACITORS;

CAPACITANCE; CAPACITORS; DIELECTRIC DEVICES; ELECTRIC CURRENTS; ELECTRIC EQUIPMENT; ENERGY STORAGE; ETCHING; GYROSCOPES; MOLECULES; NEMS; OPTICAL DESIGN; WAFER BONDING;

REACTIVE ION ETCHING;

EID: 43049090203     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/NEMS.2006.334890     Document Type: Conference Paper

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