Process window of micromachined gyroscopes subjected to vibrational frequencies

Sensors and Actuators, A: Physical

Volumn 125, Issue 2, 2006, Pages 519-525

  Chiou, J Albert ^a  

^a MOTOROLA INC   (United States)

Author keywords

FEA; MEMS Gyroscope; Modal analysis; Process window

Indexed keywords

ANGLE MEASUREMENT; FINITE ELEMENT METHOD; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; MODAL ANALYSIS; ROBOTICS; VIBRATION CONTROL;

HIGH VOLUME MASS PRODUCTION; MEMS GYROSCOPE; MICROMACHINED GYROSCOPE; VIBRATIONAL FREQUENCIES;

GYROSCOPES;

EID: 29144536154     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2005.08.021     Document Type: Article

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