High-throughput analysis of thin-film stresses using arrays of micromachined cantilever beams

Review of Scientific Instruments

Volumn 79, Issue 4, 2008, Pages

  Kim, Hyun Jong ^a,b   Han, Jun Hyun ^a,c   Kaiser, Roy ^a   Oh, Kyu Hwan ^b   Vlassak, Joost J ^a  

^a HARVARD UNIVERSITY   (United States)

^b Seoul National University   (South Korea)

^c Korea Institute of Science and Technology   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

DIFFRACTION GRATINGS; DIGITAL CAMERAS; LASER BEAMS; RESIDUAL STRESSES; SCANNING; STRESS MEASUREMENT;

COMPOSITION GRADIENTS; MICROMACHINED CANTILEVER BEAMS; THERMOMECHANICAL BEHAVIOR;

THIN FILMS;

EID: 42949173052     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2912826     Document Type: Article

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