Stress evolution in sputter-deposited Fe-Pd shape-memory thin films

Journal of Materials Research

Volumn 20, Issue 9, 2005, Pages 2279-2287

  Sugimura, Y ^a   Cohen Karni, I ^a   McCluskey, P ^a   Vlassak, J J ^a  

^a HARVARD UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; AUSTENITE; CRYSTAL STRUCTURE; DENSIFICATION; GRAIN SIZE AND SHAPE; MAGNETRON SPUTTERING; MARTENSITE; PHASE TRANSITIONS; SHAPE MEMORY EFFECT; SOLID SOLUTIONS; STRESSES; THIN FILMS;

SHAPE MEMORY THIN FILMS; STRESS EVOLUTION; SUPERSATURATED SOLID SOLUTIONS;

IRON ALLOYS;

EID: 29144497244     PISSN: 08842914     EISSN: None     Source Type: Journal    
DOI: 10.1557/JMR.2005.0283     Document Type: Article

References (35)

1. K. Shimizu and T. Kakeshita: Effect of magnetic fields on martensitic transformations in ferrous alloys and steels. ISIJ Int. 29, 97 (1989).
2. D.P. Dunne and C.M. Wayman: The effect of austenite ordering on the martensite transformation in Fe-Pt alloys near the composition Fe,Pt: I. Morphology and transformation characteristics. Metall. Trans. 4, 137 (1973).
3. D.P. Dunne and C.M. Wayman: The effect of austenite ordering on the martensite transformation in Fe-Pt alloys near the composition Fe3Pt: II. Crystallography and general features. Metall. Trans. 4, 147 (1973).
4. R.D. James and M. Wuttig: Magnetostriction of anartensite. Philos. Mag. A 77, 1273 (1998).
5. T. Kakeshita, T. Takeuchi, T. Fukuda, M. Tstijigudhi, T. Sabuti, R. Oshima, and S. Muto: Giant magnetostriction fin an ordered FesPt single crystal exhibiting a martensitic transformation. Appl. Phys. Lett. 77, 1502 (2000).
6. H. Kato, T. Wada, Y. Liang, T. Tagawa, M. Taya, and T. Moti: Martensite structure in polycrystalline Fe-Pd. Mater. Sci. Eng. A332, 134 (2002).
7. R.C. O'Handley: Model for strain and magnetization in magnetic shape memory alloys. J. Appl. Phys. 83, 3263 (1998).
8. 2MnGa single crystals. Appl. Phys. Lett. 49, 1966 (1996).
9. S. Inoue, K. Inoue, S. Fujita, and K. Koterazawa: Fe-Pd ferromagnetic shape memory alloy thin films made by dual source DC magnetron sputtering. Mater. Trans. 44, 298 (2003).
10. S. Inoue, K. Inone, K. Koterazawa, and K. Mizwuchi: Shape memory behavior of Fe-Pd alloy thin films prepared by dc magnetron sputtering. Mater. Sci. Eng. A339, 29 (2003).
11. Y. Sugimura, T. Cohen-Karni, P. McCluskey, and J.J. Vlassak: Fabrication and characterization of Fc-Pd ferromagnetic shape-memory thin films, in Materials and Devices for Smart Systems, edited by Y. Furuya, E. Quandt, Q. Zhang, K. Juone, and M. Shahinpoor (Mater. Res. Soc. Symp. Proc. 785, Warrendale, PA, 2004), D7.4.1, p. 201.
12. Z. Wang, T. Iijima, G. He, K. Oikawa, L. Wulff, N. Sanada, and Y. Furuya: Preparation of sputtere-deposited Fe-Pd thin films. Mater. Trans., Jpn. Inst. Met. 41, 1139 (2000).
13. Z. Wang, T. Iijima, G. He, T. Takahashi, and Y. Furuya: Structural characteristics and magnetic properties of Fe-Pd thin films. Int. J. Appl. Electromag. Mech. 12, 61 (2000).
14. R. Oshima: Successive martensitic transformations in Fe-Pd alloys. Scripta Metall. 15, 829 (1981).
15. M. Sugiyama, R. Oshima, and F.E. Fujita: Martensitic transformation in the Fe-Pd alloy system. Trans. Jpn. Inst. Met. 25, 585 (1984).
16. M. Sugiyama, R. Oshima, and F.E. Fujita: Mechanism of fcc-fct thermoelastic martensite transformation in Fe-Pd alloys. Trans. Jpn. Inst. Met. 27, 719 (1986).
17. M.F. Doerner and W.D. Nix: Stresses and deformation processes in thin films on substrates. CRC Crit. Rev. Solid State Mater. Sci. 14, 225 (1988).
18. P. Villars and L.D. Calvert: Pearson's Handbook of Crystallographic Data for Intermetallic Phases (American Society for Metals, Metals Park, OH, 1985).
19. R-M. Keller-Flaig and E. Arzt: Mechanical and thermal expansion behavior of thin Fe-36 wt.-% Ni Invar films. Adv. Eng. Mater. 4, 305 (2002).
20. M. Matsui, T. Shimizu, and K. Adachi: Invar anomalies of Fe-Pd alloys. Physica 119B, 84 (1983).
21. H.Y. Bai, C. Michaelsen, and R. Bormann: Inverse melting in a system with positive heats of formation. Phys. Rev. B 56, R11 (1997).
22. W. Biegel, W. Schaper, H-U. Krebs, J. Hoffmann, H.C. Freyhardt, R. Busch, and R. Bormann: Phase-transformations of supersaturated sputtered Nb Co films. J. Phys. 51, C4189 (1990).
23. R. Bormann: Thermodynamic and kinetic requirements for inverse melting. Mater. Sci. Eng. A 179/180, 31 (1994).
24. S. Muto, R. Oshima, and F.E. Fujita: Elastic softening and elastic strain-energy consideration in the fcc-fct transformation of Fe-Pd alloys. Acta Metall. Mater. 38, 685 (1990).
25. R. Oshima, S. Muto, and F.E. Fujita: Initiation of fcc-fct thermoelastic martensite-transformation from premartensitic state of Fe-30 at percent-Pd alloys. Mater. Trans. Jpn. Inst. Met. 33, 197 (1992).
26. T. Sohmara, R. Oshima, and F.E. Fujita: Thermoelastic fcc-fct martensitic transformation in Fe-Pd alloy. Scripta Metall. 14, 855 (1980).
27. P. Wollants, J.R. Roos, and L. Delaey: Thermally-induced and stress-induced thermoelastic martensitic transformations in the reference frame of equilibrium thermodynamics. Prog. Mater. Sci. 37, 227 (1993).
28. S. Miyazaki and A. Ishida: Shape memory characteristics of sputter-deposited Ti-Ni thin films. Mater. Trans. Jpn. Inst. Met. 35, 14 (1994).
29. Y. Liu and X. Huang: Substrate-induced stress and transformation characteristics of a deposited Ti-Ni-Cu thin film. Philos. Mag. 84, 1919 (2004).
30. H. Kato, Y. Liang, and M. Taya: Stress-induced fcc/fct phase transformation in Fe-Pd alloy. Scripta Mater 46, 471 (2002).
31. A. Kussmann and K. Jessen: Magnetische und dilatometrische Messungen zur Umwandlungskinetik der Eisen-Palladium Legierungen. Z. Metallkd. 54, 504 (1963).
32. M, Matsui and K. Adachi: Magneto-elastic properties and Invar anomaly of Fe-Pd alloys. Phys. B 161, 53 (1989).
33. T. Nakayama, M. Kikuchi, and K. Fukamichi: Young's modulus and the ΔE effect of Fe-Pd Invar alloys. J. Phys. F., Metal Phys. 10, 715 (1980).
34. G. Hausch and P. Schrey: Thermal expansion of Invar and Super-invar after thermomechanical treatment. Z. Metallkd. 82, 891 (1991).
35. M. Shiga: Invar alloys, in Materials Science and Technology: A Comprehensive Treatment, edited by R.W. Cahn, P. Haasen, and E.J. Kramer (VCH Verlagsgesellschaft GmbH, New York, 1990), pp. 159-210.