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Volumn 354, Issue 19-25, 2008, Pages 2341-2344
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Polycrystalline silicon with large disk-shaped grains by Ni-mediated crystallization of doped amorphous silicon
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Author keywords
Crystallization; Silicon; TEM; Thin film transistors
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Indexed keywords
AMORPHOUS SILICON;
CRYSTALLIZATION;
DOPING (ADDITIVES);
GRAIN GROWTH;
GRAIN SIZE AND SHAPE;
NICKEL;
THIN FILM TRANSISTORS;
TRANSMISSION ELECTRON MICROSCOPY;
DISK-SHAPED GRAINS;
P-DOPANT;
P-DOPED AMORPHOUS SILICON;
SILICIDE MEDIATED CRYSTALLIZATION;
POLYSILICON;
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EID: 42649131046
PISSN: 00223093
EISSN: None
Source Type: Journal
DOI: 10.1016/j.jnoncrysol.2007.10.089 Document Type: Article |
Times cited : (9)
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References (12)
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