Out-of-plane microtube arrays for biomedical sensors using vapor-liquid-solid growth method

IEEE Sensors Journal

Volumn 8, Issue 5, 2008, Pages 470-475

  Takei, Kuniharu ^a   Kawashima, Takahiro ^a   Sawada, Kazuaki ^a   Ishida, Makoto ^a  

^a TOYOHASHI UNIVERSITY OF TECHNOLOGY   (Japan)

Author keywords

Fluidic device; Microneedle array; Microtube array; Vapor liquid solid (VLS) growth

Indexed keywords

BIOCOMPATIBILITY; BIOMEDICAL ENGINEERING; FLUIDIC DEVICES; MEMS; MICROARRAYS;

MICRONEEDLE ARRAY; MICROTUBE ARRAY; PARYLENE; PATCH CLAMPS; VAPOR-LIQUID-SOLID (VLS) GROWTH;

BIOSENSORS;

EID: 42549139884     PISSN: 1530437X     EISSN: None     Source Type: Journal    
DOI: 10.1109/JSEN.2008.918262     Document Type: Article

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