Micro-powder blasting simulation with mask erosion using cellular automaton

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2007, Pages 215-218

  Yagyu, Hiromasa ^a   Tabata, Osamu ^a  

^a KYOTO UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

BLASTING; CELLULAR AUTOMATA; COMPOSITE MICROMECHANICS; EROSION; EXPLOSIVES; INDUCTIVELY COUPLED PLASMA; MECHANICAL ENGINEERING; MECHANICS; MECHATRONICS; MEMS; MICROELECTROMECHANICAL DEVICES; PATTERN RECOGNITION SYSTEMS; POLYMERS; POWDERS; REACTIVE ION ETCHING; SOIL MECHANICS; THREE DIMENSIONAL; TRANSLATION (LANGUAGES); TWO DIMENSIONAL;

AUTOMATON SIMULATION; CUTTING WEAR; INTERNATIONAL CONFERENCES; MASK EROSION; MICRO-ELECTRO MECHANICAL SYSTEMS; POWDER BLASTING;

GLASS;

EID: 42549083928     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)

1. H.Yagyu, K. Sugano, S. Hayashi and O. Tabata, "Micropowder Blasting with Nanoparticles Dispersed Polymer Mask for Rapid Prototyping of Glass Chip" J. Micromech. Microeng., 15, pp.1236-1241, 2005
2. E. Belloy, A. Sayah and M. A. M. Gijs, "Micromachining of Glass Inertial Sensors" J. Micromech. Microeng., 11, pp.85-90, 2002
3. H.Yagyu, S. Hayashi and O. Tabata, "Application of Nanoparticles Dispersed Polymer to Micropowder Blasting" J. Microelectoromech. Syst., Vol. 13 No. 1, pp. 1-6, 2004
4. H. Wensink, H. V Jansen, J. W. Berenschot and M. C. Elwenspoek, "Mask Materials for Powder Blasting" J. Micromech. Microeng, 10, pp.175-180, 2000
5. J. E. Nielson and A. Gilchrist, "Erosion by a Stream of Solid Particles" Wear, 11, pp.111-122, 1968