Application of nanoparticles dispersed polymer to micropowder blasting mask

Journal of Microelectromechanical Systems

Volumn 13, Issue 1, 2004, Pages 1-6

  Yagyu, Hiromasa ^a   Hayashi, Shigehiko ^a   Tabata, Osamu ^b  

^a Mitsuboshi Belting Ltd   (Japan)

^b KYOTO UNIVERSITY   (Japan)

Author keywords

Laser machining; Nanoparticle; Polymer mask; Powder blast

Indexed keywords

BLASTING; GLASS; LASER APPLICATIONS; MACHINING; MASKS; POWDERS; RAPID PROTOTYPING; SEMICONDUCTING POLYMERS; TEMPERATURE;

MICROPOWDER BLASTING MASK; NANOPARTICLES;

MICROELECTRONIC PROCESSING;

EID: 1542604580     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2003.823217     Document Type: Article

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