Micropowder blasting with nanoparticles dispersed polymer mask for rapid prototyping of glass chip

Journal of Micromechanics and Microengineering

Volumn 15, Issue 6, 2005, Pages 1236-1241

  Yagyu, Hiromasa ^a   Sugano, Koji ^b   Hayashi, Shigehiko ^a   Tabata, Osamu ^b  

^a Limited   (Japan)

^b KYOTO UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ASPECT RATIO; ELECTROPHORESIS; FLUORESCENCE; NANOSTRUCTURED MATERIALS; NEODYMIUM LASERS; PHOTOLITHOGRAPHY; POLYMETHYL METHACRYLATES; POLYURETHANES; RAPID PROTOTYPING;

GLASS CHIPS; MICROELECTROMECHANICAL SYSTEMS (MEMS); MICROPOWDER BLASTING; NANOPARTICLES;

MICROELECTROMECHANICAL DEVICES;

EID: 18744400501     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/15/6/014     Document Type: Article

References (13)

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