Determination of the defect depth profile after saw cutting of GaAs wafers measured by positron annihilation

Journal of Applied Physics

Volumn 84, Issue 4, 1998, Pages 2255-2262

  Borner F ^a   Eichler, S ^a   Polity, A ^a   Krause Rehberg, R ^a   Hammer, R ^b   Jurisch, M ^b  

^a MARTIN LUTHER UNIVERSITY HALLE WITTENBERG   (Germany)

^b FREIBERGER COMPOUND MATERIALS GMBH   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 4244217517     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.368291     Document Type: Article

References (29)

1. Z.-Q. Fang and D. C. Look, J. Electron. Mater. 22, 1361 (1993).
2. J. F. Higginson, Z. Korzeniowski, and D. W. Rogers, in Proceedings of the 1st International SAMPE Electron. Conference, 1995, Vols. 175-178, p. 17.
3. V. Swaminathan, M. S. Young, and R. Caruso, J. Appl. Phys. 57, 1387 (1985).
4. R. Krause-Rehberg, H. S. Leipner, A. Polity, F. Rudolf, R. Hammer, and M. Jurisch, Phys. Status Solidi A 158, 377 (1996).
5. P. Hautojärvi, Mater. Sci. Forum 175-178, 47 (1995).
6. G. Dlubek and R. Krause, Phys. Status Solidi A 102, 443 (1987).
7. M. J. Puska and R. M. Nieminen, Rev. Mod. Phys. 66, 841 (1994).
8. P. J. Schultz, K. G. Lynn, W. E. Frieze, and A. Vehanen, Phys. Rev. B 27, 6626 (1983).
9. R. Krause-Rehberg and H. S. Leipner, Appl. Phys. A: Mater. Sci. Process. 64, 457 (1997).
10. Positrons in Solids, Topics in Current Physics, edited by P. Hautojärvi (Springer, Berlin, 1979), Vol. 12.
11. B. Somieski, T. E. M. Staab, and R. Krause-Rehberg, Nucl. Instrum. Methods Phys. Res. A 381, 128 (1996).
12. T. E. M. Staab, B. Somieski, and R. Krause-Rehberg, Nucl. Instrum. Methods Phys. Res. A 381, 141 (1996).
13. M. Bertolocciani, A. Bisi, G. Gambarini, and L. Zappa, Phys. Rev. B 1, 2896 (1970).
14. W. Brandt and R. Paulin, Phys. Rev. B 5, 2430 (1972).
15. R. Krause-Rehberg, A. Polity, and T. Abgarjan, Mater. Sci. Forum 175/ 178, 427 (1995).
16. M. J. Puska, J. Phys.: Condens. Matter 1, 7347 (1989).
17. M. J. Puska and C. Corbel, Phys. Rev. B 38, 9874 (1988).
18. P. J. Schultz and K. G. Lynn, Rev. Mod. Phys. 60, 701 (1988).
19. S. Valkealathi and R. M. Niemienen, Appl. Phys. A: Solids Surf. 35, 51 (1984).
20. Y. Y. Shan, K. G. Lynn, P. Asoka-Kumar, S. Fung, and C. B. Beling, Phys. Rev. B 55, 9897 (1997).
21. S. Mantl and W. Triftshäuser, Phys. Rev. B 17, 1645 (1978).
22. L. Liszkay, C. Corbel, L. Baroux, P. Hautojärvi, M. Bayhan, A. W. Brinkmann, and S. Tatarenko, Appl. Phys. Lett. 64, 1380 (1994).
23. M. Clement, J. M. M. Nijs, P. Balk, H. Schut, and A. van Veen, J. Appl. Phys. 79, 9029 (1996).
24. M. Clement, J. M. M. Nijs, P. Balk, H. Schut, and A. van Veen, J. Appl. Phys. 71, 1943 (1997).
25. R. M. Nieminen and J. Laakkonen, Appl. Phys. 20, 181 (1979).
26. J. Gebauer, R. Krause-Rehberg, S. Eichler, M. Lysberg, H. Solm, and E. R. Weber, Appl. Phys. Lett. 71, 638 (1997).
27. S. Eichler, C. Hübner, and R. Krause-Rehberg, Appl. Surf. Sci. 116, 155 (1997).
28. W. Brandt and R. Paulin, Phys. Rev. B 15, 2511 (1977).
29. S. Pöykkö, M. J. Puska, M. Alatalo, and R. M. Nieminen, Phys. Rev. B 54, 7909 (1996).