Mechanical damage in GaAs wafers introduced by a diamond saw: A study by means of positron annihilation and electron microscopy

Physica Status Solidi (A) Applied Research

Volumn 158, Issue 2, 1996, Pages 377-383

  Krause Rehberg, R ^a   Leipner, H S ^a   Polity, A ^a   Rudolf, F ^a   Hammer, R ^b   Jurisch, M ^b  

^a MARTIN LUTHER UNIVERSITY HALLE WITTENBERG   (Germany)

^b FREIBERGER COMPOUND MATERIALS GMBH   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL DEFECTS; DIAMOND CUTTING TOOLS; ELECTRON MICROSCOPY; SAWING; SINGLE CRYSTALS; WSI CIRCUITS;

POSITRON ANNIHILATION;

SEMICONDUCTING GALLIUM ARSENIDE;

EID: 0030391906     PISSN: 00318965     EISSN: None     Source Type: Journal    
DOI: 10.1002/pssa.2211580205     Document Type: Article

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