Effect of hydrogen content on the ZnO thin films on the surface of polyethylene terephthalate substrate through electron cyclotron resonance-metal organic chemical vapor deposition

Journal of Materials Science

Volumn 43, Issue 10, 2008, Pages 3417-3423

  Park, J H ^a,b   Byun, D ^b   Jeon, B J ^c   Lee, J K ^a  

^a Korea Institute of Science and Technology   (South Korea)

^b Korea University   (South Korea)

^c Epon Co Ltd   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

METALLORGANIC CHEMICAL VAPOR DEPOSITION; POLYETHYLENE TEREPHTHALATES; SUBSTRATES; ZINC OXIDE;

CYLINDRICAL CONFIGURATION; HYDROGEN CONTENT;

THIN FILMS;

EID: 42149185769     PISSN: 00222461     EISSN: 15734803     Source Type: Journal    
DOI: 10.1007/s10853-008-2463-y     Document Type: Conference Paper

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