The effect of direct current bias on the characteristics of Cu/C:H composite thin films on poly ethylene terephthalate film prepared by electron cyclotron resonance-metal organic chemical vapor deposition

Thin Solid Films

Volumn 496, Issue 2, 2006, Pages 395-401

  Jeon, Bup Ju ^a   Ko, Hyungduk ^b   Hyun, Jin ^a,b   Byun, Dongjin ^b   Lee, Joong Kee ^a  

^a Korea Institute of Science and Technology   (South Korea)

^b Korea University   (South Korea)

Author keywords

Chemical vapor deposition; Copper; Polyethylene terephthalate; Surface structure

Indexed keywords

COMPOSITE MATERIALS; ELECTRIC CONDUCTIVITY; ELECTRIC CURRENTS; ELECTRIC POTENTIAL; ELECTRON CYCLOTRON RESONANCE; METALLORGANIC CHEMICAL VAPOR DEPOSITION; PLASTIC FILMS; POLYETHYLENE TEREPHTHALATES; SURFACE STRUCTURE;

DIRECT CURRENT (DC) BIAS SYSTEM; POLYMER SUBSTRATES; SURFACE RESISTIVITY;

THIN FILMS;

EID: 28144451548     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2005.09.095     Document Type: Article

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