Effect of hydrogen content on characteristics of Cu/C:H films coated on polyethylene terephthalate substrate prepared by ECR-MOCVD coupled with a periodic DC bias

Materials Science Forum

Volumn 510-511, Issue , 2006, Pages 666-669

  Lee, Joong Kee ^a   Jeon, Bup Ju ^a   Lee, Sangwha ^b  

^a Korea Institute of Science and Technology   (South Korea)

^b Gachon University   (South Korea)

Author keywords

Cu C: H film; DC bias; ECR; EMI (electromagnetic interference); PET; Room temperature CVD

Indexed keywords

CHEMICAL VAPOR DEPOSITION; COPPER; CRYSTALLOGRAPHY; CYCLOTRON RESONANCE; ELECTRON RESONANCE; HYDROGEN; POLYETHYLENE TEREPHTHALATES; SIGNAL INTERFERENCE; VOLATILE ORGANIC COMPOUNDS; X RAY DIFFRACTION ANALYSIS;

COPPER GRAINS; CRYSTALLOGRAPHIC STRUCTURE; DC BIAS; ROOM TEMPERATURE CVD;

COMPOSITE FILMS;

EID: 35848969819     PISSN: 02555476     EISSN: 16629752     Source Type: Book Series    
DOI: 10.4028/0-87849-995-4.666     Document Type: Conference Paper

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