Characteristics of Cu/C films on polymer substrates prepared by ECR-MOCVD

Journal of Materials Science

Volumn 41, Issue 19, 2006, Pages 6274-6279

  Jeon, Bup Ju ^a   Lee, Joong Kee ^a  

^a Korea Institute of Science and Technology   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC RESISTANCE; ELECTRON CYCLOTRON RESONANCE; METALLORGANIC CHEMICAL VAPOR DEPOSITION; MICROWAVES; PARAMETER ESTIMATION; SUBSTRATES;

DIRECT CURRENT (DC); MAGNET CURRENTS; NEGATIVE PATTERNS; POLYMER SUBSTRATES;

POLYMER FILMS;

EID: 34548551421     PISSN: 00222461     EISSN: 15734803     Source Type: Journal    
DOI: 10.1007/s10853-006-0507-8     Document Type: Article

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