Micro- and nanoprocessing of organic polymers using a compact laser plasma EUV source equipped with EUV optical systems

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6703, Issue , 2007, Pages

  Fiedorowicz, Henryk ^a   Bartnik, Andrzej ^a   Jakubczak, Krzysztof ^b   Jarocki, Roman ^a   Kostecki, Jerzy ^a   Pina, Ladislav ^c   Rakowski, Rafał ^a   Szczurek, Anna ^a   Szczurek, Mirosław ^a  

^a MILITARY UNIVERSITY OF TECHNOLOGY   (Poland)

^b INSTITUTE OF PHYSICS   (Czech Republic)

^c CZECH TECHNICAL UNIVERSITY IN PRAGUE   (Czech Republic)

Author keywords

EUV; Microstructures; Photo etching

Indexed keywords

LASER ABLATION; LASER PRODUCED PLASMAS; MICROSTRUCTURE; OPTICAL SYSTEMS; PHOTONICS; ULTRAVIOLET RADIATION;

NON-THERMAL ABLATION; PHOTO-ETCHING; SUB-MICRON SPATIAL RESOLUTION;

ORGANIC POLYMERS;

EID: 42149175607     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.735588     Document Type: Conference Paper

References (12)

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