Multi-foil optic condenser for a laser plasma EUV source

Physica Scripta T

Volumn T123, Issue , 2006, Pages 131-134

  Sveda, L ^a   Pina, L ^a   Inneman, A ^b   Semencova, V ^c   Marsik, J ^a   Hudec, R ^d   Bartnik, A ^e   Fiedorowicz, H ^e   Jarocki, R ^e   Kostecki, J ^e   Rakowski, R ^e   Szczurek, M ^e  

^a CZECH TECHNICAL UNIVERSITY IN PRAGUE   (Czech Republic)

^b Reflex sro   (Czech Republic)

^c INSTITUTE OF CHEMICAL TECHNOLOGY   (Czech Republic)

^d ASTRONOMICAL INSTITUTE   (Czech Republic)

^e MILITARY UNIVERSITY OF TECHNOLOGY   (Poland)

Author keywords

[No Author keywords available]

Indexed keywords

ASTRONOMY; COMPUTER SIMULATION; EXTREME ULTRAVIOLET LITHOGRAPHY; LASER PRODUCED PLASMAS; PLASMA DEVICES;

GRAZING ANGLES; LASER PLASMA SOURCE; SATELLITE ASTRONOMY;

CAPACITORS;

EID: 42149153910     PISSN: 02811847     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1088/0031-8949/2006/T123/019     Document Type: Conference Paper

References (3)

1. Schmidt W K H 1975 Nucl. Instrum. Methods 127 285-92
2. Hudec R et al 2004 Proc. SPIE 5488 449-59
3. Sveda L et al 2004 Proc. SPIE 5539 116-125