Optical beam steering using a 2D MEMS scanner

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6715, Issue , 2007, Pages

  Pétremand, Yves ^a   Clerc, Pierre André ^a   Epitaux, Marc ^b   Hauffe, Ralf ^b   Noell, Wilfried ^a   De Rooij, N F ^a  

^a UNIVERSITY OF NEUCHÂTEL   (Switzerland)

^b INTEL CORPORATION   (United States)

Author keywords

2D scanner; Comb drives actuators; Delay mask process; DRIE; Fiber coupling

Indexed keywords

COMPUTER SIMULATION; ELECTRIC FREQUENCY MEASUREMENT; FIBER LASERS; MEMS; OPTICAL DEVICES;

2D SCANNER; COMB DRIVES ACTUATORS; DELAY-MASK PROCESS; FIBER COUPLING;

ACTUATORS;

EID: 42149168426     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.754170     Document Type: Conference Paper

References (10)

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