Design, fabrication and characterization of optical microring sensors on metal substrates

Journal of Micromechanics and Microengineering

Volumn 18, Issue 1, 2008, Pages

  Zhang, Xugang ^a   Li, Xiaochun ^a  

^a Wisconsin Electric Machines and Power Electronics Consortium   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

OPTICAL RESONATORS; SIGNAL INTERFERENCE; SILICON WAFERS; TEMPERATURE SENSORS; THIN FILMS;

DATA COLLECTION; OPTICAL MICRORING RESONATOR; OPTICAL MICRORING SENSORS;

OPTICAL SENSORS;

EID: 41949138754     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/18/1/015025     Document Type: Article

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