Design and fabrication of micro photonic sensors for manufacturing

Proceedings of the ASME International Manufacturing Science and Engineering Conference 2007, MSEC2007

Volumn , Issue , 2007, Pages 395-400

  Zhang, Xugang ^a   Li, Xiaochun ^a  

^a Wisconsin Electric Machines and Power Electronics Consortium   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

FREE SPECTRUM RANGE (FSR); METALLIC STRUCTURES; MICRORING SENSORS; PHOTONIC SENSORS;

COMPUTER AIDED MANUFACTURING; MICROFABRICATION; OPTICAL MATERIALS; PHOTONIC CRYSTALS; RESONATORS; THIN FILMS;

OPTICAL SENSORS;

EID: 37349125979     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1115/MSEC2007-31163     Document Type: Conference Paper

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