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Volumn 153, Issue 5, 2006, Pages

Batch fabrication and characterization of micro-thin-film thermocouples embedded in metal

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROPLATING; FABRICATION; MICROSENSORS; OPTICAL RESOLVING POWER; SCANNING ELECTRON MICROSCOPY; THIN FILMS;

ENERGY-DISPERSIVE SPECTROSCOPY; THERMOELECTRIC OUTPUT; THIN FILM LAYERS; THIN-FILM THERMOCOUPLES;

THERMOCOUPLES;

EID: 33645673661 PISSN: 00134651 EISSN: None Source Type: Journal
DOI: 10.1149/1.2179218 Document Type: Article

Times cited : (30)

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