Adaptive iterative learning control for high precision motion systems

IEEE Transactions on Control Systems Technology

Volumn 16, Issue 5, 2008, Pages 1075-1082

  Rotariu, Iuliana ^a,b   Steinbuch, Maarten ^c   Ellenbroek, Rogier ^a,d  

^a PHILIPS RESEARCH LABORATORIES   (Netherlands)

^b MAPPER Lithography BV   (Netherlands)

^c EINDHOVEN UNIVERSITY OF TECHNOLOGY   (Netherlands)

^d DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

Adaptive filtering; Learning control systems; Motion control; Time frequency analysis; Time varying filters

Indexed keywords

ADAPTIVE SYSTEMS; CONTROL SYSTEMS; CONTROL THEORY; DATA ACQUISITION; EDUCATION; LEARNING ALGORITHMS; LEARNING SYSTEMS; ROBUST CONTROL; ROBUSTNESS (CONTROL SYSTEMS); STANDARDS; SYSTEMATIC ERRORS; TWO TERM CONTROL SYSTEMS; WAVE FILTERS;

ADAPTIVE FILTERING; ADAPTIVE ITERATIVE LEARNING CONTROL; BLOCK DIAGRAMS; FEED FORWARD; HIGH-PRECISION MOTION; ITERATIVE LEARNING CONTROL; LEARNING CONTROL SYSTEMS; LEARNING PROCESSES; MOTION CONTROL; MOTION PROFILE; MOTION SYSTEMS; SET POINTS; TIME FREQUENCIES; TIME-FREQUENCY ANALYSIS; TIME-VARYING; TIME-VARYING FILTERS;

ADAPTIVE CONTROL SYSTEMS;

EID: 41849129468     PISSN: 10636536     EISSN: None     Source Type: Journal    
DOI: 10.1109/TCST.2007.906319     Document Type: Article

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