|
Volumn 254, Issue 13, 2008, Pages 3867-3872
|
Substrate and orientation influence on electrical properties of sputtered La-doped PZT thin films
|
Author keywords
Crystallographic orientation; Dielectric properties; Ferroelectricity; Multi target sputtering; PLZT thin films
|
Indexed keywords
CRYSTAL ORIENTATION;
ELECTRIC PROPERTIES;
ELECTRODES;
FERROELECTRICITY;
LANTHANUM COMPOUNDS;
PHASE TRANSITIONS;
CRYSTALLOGRAPHIC ORIENTATION;
MULTI-TARGET SPUTTERING;
PLZT THIN FILMS;
THIN FILMS;
|
EID: 41749110278
PISSN: 01694332
EISSN: None
Source Type: Journal
DOI: 10.1016/j.apsusc.2007.12.008 Document Type: Article |
Times cited : (7)
|
References (22)
|