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Volumn 26, Issue 2, 2008, Pages 675-677
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Synthesis of epitaxial silicon nanowires on Si(111) substrates using ultrahigh vacuum magnetron sputtering
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Author keywords
[No Author keywords available]
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Indexed keywords
EPITAXIAL SILICON NANOWIRES;
ULTRAHIGH VACUUM MAGNETRON SPUTTERING;
EPITAXIAL GROWTH;
MAGNETRON SPUTTERING;
SILICON COMPOUNDS;
SYNTHESIS (CHEMICAL);
ULTRAHIGH VACUUM;
NANOWIRES;
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EID: 41549168166
PISSN: 10711023
EISSN: None
Source Type: Journal
DOI: 10.1116/1.2898489 Document Type: Article |
Times cited : (5)
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References (15)
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