Interdigital capacitive micromachined ultrasonic transducers for microfluidic applications

Proceedings of the IEEE Ultrasonics Symposium

Volumn 2, Issue , 2003, Pages 1171-1174

  McLean, Jeff ^a   Degertekin, F Levent ^a  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BIDIRECTIONAL PUMPING; CAPACITIVE MICROMACHINED ULTRASONIC TRANSDUCERS (CMUT); INTEGRATED ELECTRONICS; MICROFLUIDIC CHANNELS;

CAPACITANCE; CMOS INTEGRATED CIRCUITS; FINITE ELEMENT METHOD; FLUIDICS; FREQUENCIES; MICROMACHINING; PIEZOELECTRIC MATERIALS;

ULTRASONIC TRANSDUCERS;

EID: 4143127629     PISSN: 10510117     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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