Interdigital capacitive micromachined ultrasonic transducers for sensing and pumping in microfluidic applications

TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers

Volumn 1, Issue , 2003, Pages 915-918

  McLean, J ^a   Degertekin, F L ^a  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

Microfluidics; Performance evaluation; Phase measurement; Pulse generation; Pulse measurements; Pumps; Signal generators; Testing; Ultrasonic transducers; Ultrasonic variables measurement

Indexed keywords

ACTUATORS; MICROFLUIDICS; MICROSYSTEMS; PHASE MEASUREMENT; PULSE GENERATORS; PUMPS; SIGNAL GENERATORS; SOLID-STATE SENSORS; TESTING; TRANSDUCERS;

BIDIRECTIONAL PUMPING; CAPACITIVE MICROMACHINED ULTRASONIC TRANSDUCER; MICRO FLUIDIC APPLICATIONS; MICROFLUIDIC CHANNEL; PERFORMANCE EVALUATION; PULSE ECHO MEASUREMENTS; PULSE GENERATION; PULSE MEASUREMENTS;

ULTRASONIC TRANSDUCERS;

EID: 3042785507     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2003.1215624     Document Type: Conference Paper

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