Mechanical properties of carbon-doped TIN films by ion beam irradiation in ethylene gas atmosphere

Surface and Coatings Technology

Volumn 196, Issue 1-3 SPEC. ISS., 2005, Pages 104-107

  Nakamura, Isao ^a   Sasaki, Michiko ^a   Takano, Ichiro ^a   Sawada, Yoshio ^a  

^a KOGAKUIN UNIVERSITY   (Japan)

Author keywords

Carbon; Dynamic ion mixing; Ion irradiation; Titanium nitride

Indexed keywords

CARBON; COMPOSITION; DOPING (ADDITIVES); ETHYLENE; FRICTION; HARDNESS; ION BEAMS; IRRADIATION; TITANIUM NITRIDE; X RAY DIFFRACTION ANALYSIS; X RAY PHOTOELECTRON SPECTROSCOPY;

CHEMICAL STATES; COEFFICIENT OF FRICTION; EHTYLENE GAS ATMOSPHERE; ION BEAM IRRADIATION;

THIN FILMS;

TITANIUM NITRIDE;

EID: 18144376991     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2004.08.113     Document Type: Article

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