Atmospheric pressure plasma processing with microstructure electrodes and microplanar reactors

Surface and Coatings Technology

Volumn 142-144, Issue , 2001, Pages 272-276

  Schlemm, H ^a,b   Roth, D ^a  

^a Roth Rau Oberflachentechnik GmbH   (Germany)

^b Jenion Ion Beam and Surface Technique   (Germany)

Author keywords

Atmospheric pressure; Microplaner reactors; Microstructured electrodes; Plasma processing

Indexed keywords

ATMOSPHERIC PRESSURE; DEPOSITION; ELECTRODES; INERT GASES; MICROSTRUCTURE; PLASMA APPLICATIONS; THIN FILMS;

CARBON FILMS;

PLASMAS;

PLASMA TREATMENT;

EID: 0035387581     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(01)01153-7     Document Type: Article

References (10)