Understanding and improving longevity in RF MEMS capacitive switches

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6884, Issue , 2008, Pages

  Goldsmith, Chuck ^a   Forehand, David ^a   Scarbrough, Derek ^a   Peng, Zheng ^b   Palego, Cris ^b   Hwang, James ^b   Clevenger, Jason ^c  

^a MEMtronics Inc   (United States)

^b LEHIGH UNIVERSITY   (United States)

^c EXPONENT INC   (United States)

Author keywords

Dielectric charging; MEMS switches; Reliability; RF MEMS

Indexed keywords

DIELECTRIC MATERIALS; MATHEMATICAL MODELS; MEMS; WAVEFORM ANALYSIS;

DIELECTRIC CHARGING; MEMS SWITCHES;

OPTICAL SWITCHES;

EID: 41149132756     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.770586     Document Type: Conference Paper

References (9)

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