Synthesis-structure-property relations for Cr-B-N coatings sputter deposited reactively from a Cr-B target with 20 at% B

Vacuum

Volumn 82, Issue 8, 2008, Pages 771-776

  Budna, K P ^a   Neidhardt, J ^b   Mayrhofer, P H ^b   Mitterer, C ^b  

^a MATERIALS CENTER LEOBEN FORSCHUNG GMBH   (Austria)

^b UNIVERSITY OF LEOBEN   (Austria)

Author keywords

Coatings; Cr B N; Sputtering; Tribological properties

Indexed keywords

COATINGS; MAGNETRON SPUTTERING; SPUTTER DEPOSITION; SYNTHESIS (CHEMICAL); X RAY PHOTOELECTRON SPECTROSCOPY;

CR-B TARGET; TRIBOLOGICAL PROPERTIES;

CHROMIUM COMPOUNDS;

EID: 41149127878     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2007.11.003     Document Type: Article

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